An engineering playground

Mechatronics jobs | ASML careers in the semiconductor industry

With the hundreds of sensors and actuators in our lithography systems, ASML is a playground for mechatronics engineers.

You’ll get to both dive in and zoom out, focusing on our precision machines and their overall control. Tackle exciting challenges by using just the right mix of mechanics, electronics, software and optics.

Our mechatronics engineers collaborate with specialists from different fields and make it work together.

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Watch our mechatronics engineers and architects as they think outside the box – and see those ideas come to life.

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Watch as one of our mechatronics engineers works to make a big impact on tech, all on a nanometer scale.

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Discover what ASML has to offer in mechatronics.

Many of our mechatronics engineers work on our extreme ultraviolet (EUV) lithography machines – and you could, too. Scroll down to take a peek inside one of these complex systems.

Explore the parts of an EUV machine you’ll work on as a mechatronics engineer at ASML

To generate EUV light, the source fires two separate laser pulses at a fast-moving drop of tin. This vaporizes the tin and creates EUV light. It does this up to 50,000 times per second.

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EUV systems use several multilayer mirrors instead of lenses to guide the EUV light to the wafer, shrinking the reticle pattern by a factor of four.

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Reticles contain the chip pattern to be printed on the wafer. In EUV, reticles are multilayer reflectors that use interference to reflect light from the pattern.

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EUV light is absorbed by everything, even air. So the whole light path and everything the light interacts with – from source to wafer – must be in high vacuum.

Precision robot arms transfer wafers in and out of the system’s vacuum environment through an air lock, operating within a positioning accuracy of 25 µm and a uniform surface temperature within 2 mK.

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The wafer stage positions the wafer to within a quarter of a nanometer for each exposure, checking and adjusting 20,000 times per second.

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R&D, manufacturing, and customer support are the pillars of our organization, supported by our corporate functions.

Design, build and test exceptionally high-performance systems as a mechanical engineer at ASML.